Muammer Koç & Tugrul Özel 
Micro-Manufacturing 
Design and Manufacturing of Micro-Products

This book is the first of its kind to collectively address
design-based and mechanical micro-manufacturing topics in one
place. It focuses on design and materials
selection, as well as the manufacturing of micro-products using
mechanical-based micro-manufacturing process technologies.
After addressing the fundamentals
and non-metallic-based micro-manufacturing processes in
the semiconductor industry, it goes on to address specific
metallic-based micro-manufacturing processes, such
as: micro-forming, micro-machining, micro-molding, micro-laser
processing, micro-layered manufacturing, micro-joining,
micro-assembly and materials handling, and micro EDM and ECM. The
book provides an in-depth understanding of materials behavior at
micro-scales and under different micro-scale processing conditions,
while also including a wide variety of emerging micro-scale
manufacturing issues and examples.

Table of Content

Foreword vii

Contributors ix

1 Fundamentals of Micro-Manufacturing 1

2 Micro-Fabrication Processes in Semiconductor Industry 25

3 Modeling and Analysis at Micro-Scales 43

4 Metrology, Inspection, and Process Control in Micro-Scales 71

5 Micro-Layered Manufacturing 97

6 Micro-Laser Processing 159

7 Polymer Micro-Molding/Forming Processes 197

8 Mechanical Micro-Machining 235

9 Micro-Forming 275

10 Micro-Electro Discharge Machining (mu EDM) 301

11 Metal Injection Molding at Micro-Scales (mu MIM) 347

Index 371

About the author

Muammer Koç, Ph D, is the Director of National Science
Foundation (NSF)-Industry/University Cooperative Research Center
(I/UCRC) on Precision Forming (CPF), Associate Professor in the
Department of Mechanical Engineering at Virginia Commonwealth
University; and Associate Professor of Department of Industrial
Engineering at Istanbul Sehir University. His research interests
include manufacturing processes and systems, micro-manufacturing,
design of nano/micro-scale functional surface structures, and
product innovation.

Tugrul Özel, Ph D, is the Director of
Manufacturing Automation Research Laboratory and Associate
Professor in the Department of Industrial and Systems Engineering
at Rutgers University in New Jersey. His research interests include
manufacturing processes and automated systems, computational
modeling of machining processes, laser-based micro/nano processing,
and design and manufacturing of micro-products.