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Fundamentals of Micromachined Vibratory Gyroscopes.- Fundamentals of Micromachined Gyroscopes.- Fabrication Technologies.- Mechanical Design of MEMS Gyroscopes.- Electrical Design of MEMS Gyroscopes.- Structural Approaches to Improve Robustness.- Linear Multi DOF Architecture.- Torsional Multi DOF Architecture.- Distributed Mass Architecture.- Conclusions and Future Trends.

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

Format
PDF-ebook
Sprache
englisch 
Altersgruppe
02-99
Seiten
260
Dateigröße
43.8 MB
abrufbar
24 Monate
Kopierschutz
Adobe DRM
Verlag
Springer US
Erscheinungsort
NY/US
Ausgabe
Ausgabe
Artikel
DG2143736

'MEMS Vibratory Gyroscopes' von Cenk Acar & Andrei Shkel ist ein digitales PDF ebook zum direkten download auf PC, Mac, Notebook, Tablet, iPad, iPhone, Smartphone, eReader - nicht aber auf Kindle. Sie benötigen eine DRM-fähige Reader-Ausstattung.

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