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Cenk Acar & Andrei Shkel 
MEMS Vibratory Gyroscopes 
Structural Approaches to Improve Robustness

Wsparcie

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

€181.89
Metody Płatności

Spis treści

Fundamentals of Micromachined Vibratory Gyroscopes.- Fundamentals of Micromachined Gyroscopes.- Fabrication Technologies.- Mechanical Design of MEMS Gyroscopes.- Electrical Design of MEMS Gyroscopes.- Structural Approaches to Improve Robustness.- Linear Multi DOF Architecture.- Torsional Multi DOF Architecture.- Distributed Mass Architecture.- Conclusions and Future Trends.
Język Angielski ● Format PDF ● Strony 260 ● ISBN 9780387095363 ● Rozmiar pliku 43.8 MB ● Wydawca Springer US ● Miasto NY ● Kraj US ● Opublikowany 2008 ● Do pobrania 24 miesięcy ● Waluta EUR ● ID 2143736 ● Ochrona przed kopiowaniem Społeczny DRM

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