Robert Jones & Hans Meixner 
Sensors Volume 8: Micro- and Nanosensor Technology – Trends in Sensor Markets 
A Comprehensive Survey

Sensors is the first self-contained series to deal with the whole area of sensors. It describes general aspects, technical and physical fundamentals, construction, function, applications and developments of the various types of sensors.

This final volume of the series uncovers trends in sensor technology and gives a comprehensive overview of the sensor market. The use of sensors in microsystems and in vacuum microelectronic as well as in acoustic wave devices is discussed. Present and emerging applications of sensors in aerospace, environmental, automotive, and medical industries, among others, are described.

This volume is an indispensable reference work for both specialists and newcomers, researchers and developers

Inhaltsverzeichnis

PART I: MICRO-AND NANOTECHNOLOGY
Sensors in Micro and Nanotechnology (H. Meixner)
Approach to Microsystem Design (B. Kloeck, M. Derauwe)
Sensors in Microsystems (H. Baltes, C. de Azeredo Leme)
Three-Dimensional Microsensor Technology (H. J. Ache, W. Menz, J. Mohr, M. Strohrmann, W. Schomburg, B. Büstgens, J. Reichert, W. Hoffmann, W. Faubel)
Acoustic Wave Devices (SAW and BAW) (G. Fischerauer, A. Mauder, R. Müller)
High-Temperature Microsensors (J. Gerblinger, K. H. Härdtl, R. Aigner, H. Meixner)
Integrated Optics Sensors (H. Teichmann)
Optical Microsensors (H. Bartelt)
Materials in Nanotechnology (H. Schmidt)
Future Information Technologies (W. Göpel)
Future Nanosensors (R. Wiesendanger)
PART II: SENSOR MARKETS
Trends in Sensor Technologies and Markets (R. Jones)
Aerospace Sensors (R. Czichy)
Process Sensing and Control (M. J. Scott)
Medical and Healthcare Sensors (V. M. Owen)
Environmental Sensors (K. Jones)
Automotive Sensors (P. Cockshott)
Sensors in Manufacturing and Quality Assurance (N. Pratt)