A. G. Grigor’yants & M. A. Kazaryan 
Laser Precision Microprocessing of Materials 

This reference focuses on the current state of fundamental research and industrial achievements in the field of precision laser processing of a wide range of metal, semiconductor and dielectric materials. The possibilities of microprocessing by pulsed nanosecond laser radiation and copper vapor laser systems are analyzed. Design and operation principles, ways to increase their efficiency and reliability, and a series of modern automated technological installations are described. The work will be of interest to specialists, engineers, students and graduate students working and studying in the field of laser technology and optics, laser and information technology.