This book is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low energy ion beams with materials. The main procedures used for IAD synthesis of thin films and the main effects of ion beam bombardment on growing films, such as densification, stress, mixing, surface flattening and changes in texture are critically discussed. A description of some of the applications of IAD methods and a review of the synthesis by IAD of diamond-like carbon and cubic-boron nitride complete the book.
Ngôn ngữ Anh ● định dạng PDF ● Trang 300 ● ISBN 9781848161320 ● Kích thước tập tin 22.9 MB ● Nhà xuất bản World Scientific Publishing Company ● Thành phố Singapore ● Quốc gia SG ● Được phát hành 2003 ● Có thể tải xuống 24 tháng ● Tiền tệ EUR ● TÔI 2423336 ● Sao chép bảo vệ Adobe DRM
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