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Fundamentals of Micromachined Vibratory Gyroscopes.- Fundamentals of Micromachined Gyroscopes.- Fabrication Technologies.- Mechanical Design of MEMS Gyroscopes.- Electrical Design of MEMS Gyroscopes.- Structural Approaches to Improve Robustness.- Linear Multi DOF Architecture.- Torsional Multi DOF Architecture.- Distributed Mass Architecture.- Conclusions and Future Trends.

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

Format
PDF-ebook
Language
english 
Age
02-99
Pages
260
File Size
43.8 MB
retrievable
24 months after purchase
Copy Protection
Adobe DRM
Publisher
Springer US
place of publication
NY/US
Edition
Published
Product No.
DG2143736

'MEMS Vibratory Gyroscopes' by Cenk Acar & Andrei Shkel is a digital PDF ebook for direct download to PC, Mac, Notebook, Tablet, iPad, iPhone, Smartphone, eReader - but not for Kindle. A DRM capable reader equipment is required.

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